POLISHING PAD SURFACE PROPERTY MEASUREMENT APPARATUS, POLISHING PAD SURFACE PROPERTY MEASUREMENT METHOD, AND POLISHING PAD SURFACE PROPERTY DETERMINATION METHOD

To provide a polishing pad surface property measurement apparatus which can improve measurement accuracy of a surface property of a polishing pad.SOLUTION: A surface property measurement apparatus includes a projection part 32 capable of irradiating a polishing pad 2 with light from a plurality of irradiation angles when the polishing pad 2 is viewed from a polishing surface side of the polishing pad 2, and a light-receiving part 35 capable of receiving reflected light from a plurality of directions reflected on the surface of the polishing pad 2. The surface property measurement apparatus further includes an irradiation direction changing mechanism for changing the light irradiation direction, and the irradiation direction changing mechanism includes a motor for rotating the projection part and the light-receiving part, and a shaft connected to the rotation motor.SELECTED DRAWING: Figure 2 【課題】研磨パッドの表面性状の測定精度を向上させることができる、研磨パッドの表面性状測定装置を提供する。【解決手段】表面性状測定装置は、研磨パッド２を研磨パッド２の研磨面側から見たときに、光を、複数の照射角度から研磨パッド２に照射可能な投光部３２と、研磨パッド２の表面で反射した複数の方向からの反射光を受光可能な受光部３５を備えている。さらに、光の照射方向を変更する照射方向変更機構を備え、該照射方向変更機構は、前記投光部および前記受光部を回転させるモータと、前記回転モータに連結されたシャフトを備える。【選択図】図２