POLISHING HEAD AND POLISHING DEVICE

To efficiently cool a polishing head against heat generated during polishing.SOLUTION: A polishing head 200 for polishing a substrate 110 held with a polished surface up comprises: a shaft 240; a flange 210 fixed to the shaft 240; and a plurality of fins 280 provided on the surface other than the su...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KOBAYASHI KENICHI, FURUSAWA MANATO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	To efficiently cool a polishing head against heat generated during polishing.SOLUTION: A polishing head 200 for polishing a substrate 110 held with a polished surface up comprises: a shaft 240; a flange 210 fixed to the shaft 240; and a plurality of fins 280 provided on the surface other than the surface of the flange 210 to which a polishing pad 500 pressed to the polished surface by the shaft 240 is fitted.SELECTED DRAWING: Figure 3 【課題】研磨時に発生する熱に対して研磨ヘッドを効率よく冷却する。【解決手段】被研磨面を上向きにした状態で保持された基板１１０を研磨するための研磨ヘッド２００は、シャフト２４０と、シャフト２４０に固定されたフランジ２１０と、シャフト２４０によって被研磨面に押圧される研磨パッド５００が取り付けられるフランジ２１０の面以外の面に設けられた複数のフィン２８０と、を備える。【選択図】図３