AI MODEL GENERATION METHOD AND INSPECTION DEVICE

To provide a generation method of an AI (artificial intelligence) model and an inspection device which corrects an image by the AI model where the accuracy of inspection by correcting noise removal and resolution enhancement may be improved by the AI model generated by learning using AI.SOLUTION: In...

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Bibliographische Detailangaben
Hauptverfasser:	KITAHATA ATSUSHI, SUDA TAKERU, YAMAMOTO YOSUKE
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Zusammenfassung:	To provide a generation method of an AI (artificial intelligence) model and an inspection device which corrects an image by the AI model where the accuracy of inspection by correcting noise removal and resolution enhancement may be improved by the AI model generated by learning using AI.SOLUTION: In a generation method of an AI model in an inspection device 1 which corrects an image of an inspection object using the AI model generated by machine learning, a high-quality image of the inspection object picked up by the inspection device 1 is used as a teacher image, a low-quality image of the inspection object picked up by the inspection device 1 and sharing the same visual field as the teacher image is used as a learning image, the learning image is used as an input, an image corrected by the AI model is used as an output, and the output is compared with the teacher image to generate an AI model.SELECTED DRAWING: Figure 6 【課題】ノイズの除去や高解像度化を、ＡＩ（人工知能）を用いた学習で作成したＡＩモデルにより補正することで検査の精度を向上させる、ＡＩモデルの作成方法、及びこのＡＩモデルにより画像を補正する検査装置を提供する。【解決手段】機械学習により作成されたＡＩモデルを用いて被検査体の画像を補正する検査装置１におけるＡＩモデルの作成方法は、検査装置１で撮像された被検査体の画質の高い画像を教師用画像とし、検査装置１で撮像された被検査体の画質の低い画像であって、教師用画像と同一の視野の画像を学習用画像とし、学習用画像を入力とし、ＡＩモデルにより補正された画像を出力とし、出力と教師用画像とを比較して学習することにより、ＡＩモデルを作成する。【選択図】図６