MAGNETIC LEVITATION PLANE STAGE DEVICE, VACUUM DEVICE, AND CHARGED PARTICLE BEAM DEVICE

To provide a magnetic levitation plane stage device that suppresses deterioration of drive characteristics due to a refrigerant piping, suppresses leakage magnetic field due to a permanent magnet, suppress minute vibration of a top table due to coil current noise, and improves positioning accuracy.S...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	TAKAHASHI MUNEHIRO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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