MAGNETIC LEVITATION PLANE STAGE DEVICE, VACUUM DEVICE, AND CHARGED PARTICLE BEAM DEVICE

To provide a magnetic levitation plane stage device that suppresses deterioration of drive characteristics due to a refrigerant piping, suppresses leakage magnetic field due to a permanent magnet, suppress minute vibration of a top table due to coil current noise, and improves positioning accuracy.S...

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1. Verfasser: TAKAHASHI MUNEHIRO
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To provide a magnetic levitation plane stage device that suppresses deterioration of drive characteristics due to a refrigerant piping, suppresses leakage magnetic field due to a permanent magnet, suppress minute vibration of a top table due to coil current noise, and improves positioning accuracy.SOLUTION: A magnetic levitation plane stage device according to the present invention includes a floating portion having a top table that supports an object for positioning, and a permanent magnet that is arranged planarly at the bottom of the top table, and a fixed portion having a mounting base that moves the floating portion, and coils that are arranged in a plane on the top of the mounting base. The magnetic levitation plane stage device has a movable yoke 401 that moves in a horizontal plane at the lower part of the mounting base, and the movable yoke includes a movable yoke drive stage, and a permanent magnet arranged in a plane on the top of the movable yoke drive stage, and the permanent magnet of the movable yoke and the permanent magnet of the floating portion face each other, and the floating portion floats due to the magnetic repulsive force of these permanent magnets.SELECTED DRAWING: Figure 3 【課題】本発明は、冷媒配管による駆動特性の劣化を抑制し、永久磁石による漏洩磁場を抑制し、コイルの電流ノイズによるトップテーブルの微小振動を抑制し、位置決め精度を向上させる磁気浮上平面ステージ装置を提供する。【解決手段】本発明の磁気浮上平面ステージ装置は、位置決めするための対象物を支持するトップテーブルと、トップテーブルの下部に平面的に配列される永久磁石と、を有する浮上部と、浮上部を移動させる搭載ベースと、搭載ベースの上部に平面的に配列されるコイルと、を有する固定部と、を有する。そして、この磁気浮上平面ステージ装置は、搭載ベースの下部に、水平面内を移動する可動ヨーク401を有し、可動ヨークは、可動ヨーク駆動用ステージと、可動ヨーク駆動用ステージの上部に平面的に配列される永久磁石と、を有し、可動ヨークの永久磁石と浮上部の永久磁石とは対向し、浮上部は、これら永久磁石の磁気反発力により、浮上することを特徴とする。【選択図】 図3