COMPUTER SYSTEM FOR OBSERVATION DEVICE AND METHOD FOR PROCESSING

To provide a technique of an observation device and an inspection device that can reduce the work labor related to preparing recipes including alignment information.SOLUTION: An observation device 1 has an observation unit 103 for obtaining an image for observing a sample 101 on a stage 102. A compu...

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Hauptverfasser:	MIYAKE KOZO, MATSUMOTO KOSUKE, FUKUDA MIYUKI, TAKADA SATORU, ISOMAE YUYA, NAKAYAMA HIDEKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES
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Zusammenfassung:	To provide a technique of an observation device and an inspection device that can reduce the work labor related to preparing recipes including alignment information.SOLUTION: An observation device 1 has an observation unit 103 for obtaining an image for observing a sample 101 on a stage 102. A computer system 2 of the observation device 1 acquires an image from the observation unit 103, specifies the cycle of a pattern formation unit region formed repeatedly in a surface of the sample 101 from the image, and generates a recipe including an alignment position of the sample 101 for observation and inspection by using the specified cycle.SELECTED DRAWING: Figure 1 【課題】観察装置・検査装置の技術に関して、アライメント情報を含むレシピの作成に係わる作業手間を低減できる技術を提供する。【解決手段】観察装置１は、ステージ１０２上の試料１０１を観察するための画像を得る観察部１０３を有する。観察装置１のコンピュータシステム２は、観察部１０３から画像を取得し、画像から、試料１０１の面において繰り返し形成されているパターン形成単位領域の周期を特定し、特定した周期を用いて、試料１０１の観察・検査用のアライメント位置を含むレシピを生成する。【選択図】図１