VAPOR DEPOSITION DEVICE AND MANUFACTURING APPARATUS OF DISPLAY PANEL INCLUDING THE SAME

To provide a vapor deposition device in which an uneven temperature of a surface to which a substrate is chucked is released, and provide a manufacturing apparatus of a display panel containing them.SOLUTION: A vapor deposition device contains: a susceptor SC in which a plurality of susceptor holes...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE YOU JONG, SUNG HYUNAH, YU DOOSEON, BAEK GYUNGMIN, SHIN HYUNEOK, KANG NAMWOOK
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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