HIGH PERFORMANCE SUSCEPTOR APPARATUS

To resolve issues related to physical interaction between a substrate and a susceptor.SOLUTION: A substrate support and lift assembly configured to support a substrate and lift it from a susceptor is disclosed. The substrate support and lift assembly can include a susceptor support and a lift pin. T...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GAO PEIPEI, WANG WENTAO, LUAN SIYAO, GAO FAN, CHAO ION HONG, YE HAN, LIN XING, ALEXANDROS DEMOS
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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