X-RAY DIFFRACTION MEASUREMENT DEVICE, X-RAY DIFFRACTION MEASUREMENT SYSTEM, AND DIFFRACTION RING IMAGING METHOD

To provide an X-ray diffraction measurement device that images diffraction rings by X-ray irradiation, and that can create successive and clear images of diffraction rings with deviations thereof from a perfect circle mostly caused by residual stress.SOLUTION: An X-ray diffraction measurement device 1 includes: a swinging rotary mechanism 5 that swings a housing 50 of the X-ray diffraction measurement device 1 about a rotation axis perpendicular to the optical axis of X-rays, and that changes the position of the rotation axis of the swing with respect to a measuring object OB; a mask 100 that has a passage port and is arranged in front of an imaging plate 15; and a mechanism for changing the position of the passage port with respect to the measuring object OB. A diffraction ring is imaged by: swinging the housing 50; changing the position of the rotation axis of the swing, while fixing the position of rotation of the imaging plate 15 about the optical axis of X-rays with respect to the measuring object OB; and changing the position of the passage port such that the center line of the passage port of the mask 100 is always included in a plane which includes the optical axis of X-rays and is perpendicular to the rotation axis of the swing.SELECTED DRAWING: Figure 2 【課題】 Ｘ線を照射して回折環を撮像するＸ線回折測定装置において、連続かつ明瞭な回折環を撮像でき、撮像される回折環の真円からのずれを、ほとんど残留応力によるものにすることができる装置を提供する。【解決手段】 Ｘ線回折測定装置１の筐体５０をＸ線の光軸に対して垂直な回転軸周りに揺動させるとともに、揺動の回転軸の位置を測定対象物ＯＢに対して変化させる揺動回転機構５を設け、イメージングプレート１５の手前に通過口を有するマスク１００を配置し、通過口の位置を測定対象物ＯＢに対して変化させる機構を設ける。回折環を撮像する際、筐体５０を揺動させ、測定対象物ＯＢに対するイメージングプレート１５のＸ線の光軸周りの回転位置を固定した状態にして揺動の回転軸の位置を変化させ、マスク１００の通過口の中心線が、常にＸ線の光軸を含み揺動の回転軸に垂直な平面内に含まれるよう、通過口の位置を変化させる。【選択図】図２