INSPECTION DEVICE AND INSPECTION METHOD

To provide an inspection device and an inspection method that are capable of checking for foreign matters or defects inside a container for wafers more reliably than visual inspection by a person.SOLUTION: An inspection device, which inspects a container including a light transmissive transparent po...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KARAKI YOICHI, ICHIKAWA SHINNOSUKE
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	To provide an inspection device and an inspection method that are capable of checking for foreign matters or defects inside a container for wafers more reliably than visual inspection by a person.SOLUTION: An inspection device, which inspects a container including a light transmissive transparent portion and configured to house wafers, comprises: a flat lighting arranged so as to irradiate, with light, a to-be-inspected portion including at least a part of the transparent portion of the container; and a camera that is arranged so as to face the flat lighting across the to-be-inspected portion of the container, and that is configured to image the to-be-inspected portion and to detect foreign matters and/or defects in the to-be-inspected portion of the container.SELECTED DRAWING: Figure 1 【課題】ウェーハの収容容器内部に異物や欠陥が存在しているか否かを、人による目視検査よりも確実に検査できる検査装置及び検査方法を提供すること。【解決手段】光透過性の透明部を含み且つウェーハを収容するように構成された収容容器を検査する検査装置であって、前記収容容器の前記透明部の少なくとも一部を含む被検査部に光を照射するように配置されたフラット型照明と、前記収容容器の前記被検査部を間に挟んで前記フラット型照明と対向するように配置され、前記被検査部を撮像して前記収容容器の前記被検査部の異物及び／又は欠陥を検出するように構成されたカメラとを備えたものであることを特徴とする検査装置。【選択図】図１