GRINDING DEVICE

To provide a grinding device that allows omission of a process of manually removing grinding chips sticking to an annular frame.SOLUTION: A grinding device includes: a chuck table for sucking and holding, via a protective tape, a workpiece stuck on an inner side relative to an inner peripheral edge...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HOSHIKAWA HIROTOSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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