CRYOPUMP AND REGENERATION METHOD OF CRYOPUMP

CRYOPUMP AND REGENERATION METHOD OF CRYOPUMP

To provide a cryopump that makes it possible to remove organic matter deposited on a cryopanel.SOLUTION: A cryopump 10 includes at least one cryopanel 38 including a photocatalyst layer 50 on a surface thereof, and an excitation light source 60 that is disposed so as to irradiate the photocatalyst l...

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Bibliographische Detailangaben
1. Verfasser: MOCHIZUKI TAKAO
Format: Patent
Sprache:eng ; jpn
Schlagworte:
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
SEPARATION
TRANSPORTING
WEAPONS
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Beschreibung
Zusammenfassung:To provide a cryopump that makes it possible to remove organic matter deposited on a cryopanel.SOLUTION: A cryopump 10 includes at least one cryopanel 38 including a photocatalyst layer 50 on a surface thereof, and an excitation light source 60 that is disposed so as to irradiate the photocatalyst layer 50 with excitation light 62 that activates the photocatalyst layer 50. The photocatalyst layer 50 contains a visible light-responsive photocatalyst material. The excitation light source 60 may emit, as the excitation light 62, light having a visible-light wavelength region that activates the visible light-responsive photocatalyst material.SELECTED DRAWING: Figure 1 【課題】クライオパネルに付着した有機物の除去を可能にするクライオポンプを提供する。【解決手段】クライオポンプ１０は、表面に光触媒層５０を有する少なくとも１つのクライオパネル３８などの極低温面と、光触媒層５０を活性化させる励起光６２を光触媒層５０に照射するように配置された励起光源６０と、を備える。光触媒層５０は、可視光応答型光触媒材料を含有し、励起光源６０は、励起光６２として、可視光応答型光触媒材料を活性化させる可視光波長域を含む光を発してもよい。【選択図】図１