THREE-DIMENSIONAL SHAPE MEASURING METHOD AND THREE-DIMENSIONAL SHAPE MEASURING DEVICE

To provide a three-dimensional shape measuring method and a three-dimensional shape measuring device that can measure the three-dimensional shape of an object with high measuring accuracy even when the object has a pattern or dirt on it.SOLUTION: A three-dimensional shape measuring method includes the steps of: projecting, on an object, a grating pattern generated by using first polarized light and a whole surface pattern generated by using second polarized light whose plane of polarization is orthogonal to that of the first polarized light; picking up images of the grating pattern and the whole surface pattern projected on the object with a camera to obtain a first picked-up image created by using the first polarized light and a second picked-up image created by using the second polarized light; correcting the luminance value of the first picked-up image based on the second picked-up image; and performing phase analysis of the grating pattern for the first picked-up image after the correction to calculate information on the height of the object.SELECTED DRAWING: Figure 6 【課題】対象物に模様や汚れ等がある場合でも、対象物の三次元形状を高い計測精度で計測可能な三次元形状計測方法および三次元形状計測装置を提供すること。【解決手段】第１偏光による格子パターン、および、前記第１偏光に対して偏光面が直交している第２偏光による全面パターンを、対象物に投影するステップと、前記対象物に投影されている前記格子パターンおよび前記全面パターンを、カメラで撮像し、前記第１偏光による第１撮像画像および前記第２偏光による第２撮像画像を得るステップと、前記第２撮像画像に基づいて、前記第１撮像画像の輝度値を補正するステップと、補正後の前記第１撮像画像について、前記格子パターンの位相解析を行い、前記対象物の高さ情報を算出するステップと、を有することを特徴とする三次元形状計測方法。【選択図】図６