SUBSTRATE CONVEYING DEVICE AND INSPECTION DEVICE

To provide a substrate conveying device that can properly maintain the height position and posture of a substrate, and an inspection device.SOLUTION: In an inspection device 100, a substrate conveying device 200 supports a display panel 1 held by a holder 20 with roller surfaces 501 of a plurality o...

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Bibliographische Detailangaben
Hauptverfasser:	YOSHIDA SHIYOUGO, AKAHA MASATOSHI, SATO SHIRO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING HANDLING THIN OR FILAMENTARY MATERIAL NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide a substrate conveying device that can properly maintain the height position and posture of a substrate, and an inspection device.SOLUTION: In an inspection device 100, a substrate conveying device 200 supports a display panel 1 held by a holder 20 with roller surfaces 501 of a plurality of support rollers 50 arranged along a conveyance direction X and a width direction Y of the display panel 1, and causes the display panel 1 to travel on the plurality of support rollers 50 with a conveying mechanism 60 including a linear driving mechanism 61. The plurality of support rollers 50 are composed of resin roller bearings having the roller surfaces 501 made of resin. Consequently, unlike a case in which the display panel is conveyed by a roller conveyor, when the display panel 1 is conveyed, the display panel 1 does not easily vibrate. Thus, partial floating of the display panel 1 from the support rollers 50 can be prevented.SELECTED DRAWING: Figure 2 【課題】基板の高さ位置や姿勢を適正に維持することのできる基板搬送装置、および検査装置を提供すること。【解決手段】検査装置１００において、基板搬送装置２００では、表示パネル１の搬送方向Ｘおよび幅方向Ｙの各々に沿って配置された複数の支持ローラ５０のローラ面５０１で、ホルダ２０に保持された表示パネル１を支持し、直線駆動機構６１を含む搬送機構６０によって、表示パネル１を複数の支持ローラ５０上を走行させる。また、複数の支持ローラ５０は、ローラ面５０１が樹脂製になっている樹脂ローラベアリングからなる。このため、ローラコンベアで表示パネルを搬送する場合と違って、表示パネル１を搬送した際、表示パネル１が振動しにくい。従って、表示パネル１の支持ローラ５０からの部分的な浮きを抑制することができる。【選択図】図２