CLEANING DEVICE

To provide a cleaning device enabling prevention of such a problem that cleaning water supplied to a workpiece circumferentially scatters and dust in the scattered water is re-deposited to the workpiece.SOLUTION: A cleaning device includes: a spinner table holding a workpiece; a cleaning nozzle which supplies cleaning water to the workpiece held by the spinner table; an ultrasonic vibrator which imparts ultrasonic vibration to the cleaning water supplied from the cleaning nozzle to the workpiece; a water layer forming unit which includes a cover enclosing the cleaning nozzle and forms a layer of the cleaning water in a gap between the cleaning nozzle and the workpiece; and a discharge unit which includes a flow passage where the cleaning water supplied from the cleaning nozzle to the workpiece flows, and discharges the cleaning water to the outside.SELECTED DRAWING: Figure 2 【課題】ワークピースに供給された洗浄水が周囲に飛散して、この洗浄水中の屑がワークピースに再付着することを防止できる洗浄装置を提供する。【解決手段】洗浄装置は、ワークピースを保持するスピンナテーブルと、スピンナテーブルに保持されたワークピースに洗浄水を供給する洗浄ノズルと、洗浄ノズルからワークピースに供給される洗浄水に超音波振動を付与する超音波振動子と、洗浄ノズルを囲むカバーを有し、洗浄ノズルとワークピースとの隙間に洗浄水の層を形成する水層形成ユニットと、洗浄ノズルからワークピースに供給された洗浄水が流れる流路を有し、洗浄水を外部に排出する排出ユニットと、を含む。【選択図】図２