SILICA DISPERSION, AND POLISHING AGENT COMPOSITION

To provide an antibacterial agent-blended silica dispersion having an antibacterial properties, scarce in reduction of a polishing speed even when used as one constituent of a polishing agent composition, and good in surface conditions of a board after polishing.SOLUTION: The silica dispersion conta...

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1. Verfasser: HARAGUCHI TETSURO
Format: Patent
Sprache:eng ; jpn
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