SILICA DISPERSION, AND POLISHING AGENT COMPOSITION

To provide an antibacterial agent-blended silica dispersion having an antibacterial properties, scarce in reduction of a polishing speed even when used as one constituent of a polishing agent composition, and good in surface conditions of a board after polishing.SOLUTION: The silica dispersion conta...

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1. Verfasser: HARAGUCHI TETSURO
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To provide an antibacterial agent-blended silica dispersion having an antibacterial properties, scarce in reduction of a polishing speed even when used as one constituent of a polishing agent composition, and good in surface conditions of a board after polishing.SOLUTION: The silica dispersion contains colloidal silica, and an organic compound having a hemiformal structure. The organic compound having a hemiformal structure may be an aliphatic organic compound, an aromatic organic compound, or further a compound formed by combining an aliphatic organic compound with an aromatic organic compound.SELECTED DRAWING: None 【課題】抗菌性を有し、研磨剤組成物の一成分として使用する場合であっても、研磨速度の低下が僅かであり、研磨後の基板の表面状態が良好な抗菌剤を配合したシリカ分散液の提供を課題とする。【解決手段】シリカ分散液は、コロイダルシリカと、ヘミホルマール構造を有する有機化合物とを含有する。ヘミホルマール構造を有する有機化合物は、脂肪族有機化合物または芳香族有機化合物であってもよく、更に、脂肪族有機化合物と芳香族有機化合物とを組み合わせて形成されるものであっても構わない。【選択図】なし