LASER PROCESSING DEVICE AND LASER PROCESSING SYSTEM

To provide a laser processing device that prevents scattered matters such as fume or spatter generated during processing from adhering to a workpiece.SOLUTION: A laser processing device comprises an upper housing for holding a workpiece from the upper surface side and a lower housing for holding the workpiece from the lower surface side that is the opposite side from the upper surface. The upper housing includes a laser transmission window and forms an upper closed space defined by the upper housing and the workpiece on the inner side of the upper housing when the workpiece is held. An upper communication hole which allows communication between the inner side and the outer side of the upper closed space and though which fluid can be supplied to the upper closed space is formed in a portion of the upper housing. The lower housing forms a lower closed space defined by the lower housing and the workpiece on the inner side of the lower housing when the work is held. A lower communication hole which allows communication between the inner side and the outer side of the lower closed space and through which the fluid can be discharged from the lower closed space is formed in a portion of the lower housing.SELECTED DRAWING: Figure 1 【課題】レーザ加工装置において、加工中に生じたヒュームやスパッタ等の飛散物が、被加工物に付着することを抑制する。【解決手段】レーザ加工装置は、上面側から被加工物を挟持するための上側筐体と、上面とは逆側の下面側から被加工物を挟持するための下側筐体とを備える。上側筐体は、レーザ透過窓を有し、被加工物を挟持した際、上側筐体の内側に上側筐体と被加工物とで区画された上側閉空間を形成し、上側筐体の一部分には、上側閉空間の内外を連通し上側閉空間に対する流体の供給が可能な上側連通孔が形成されている。下側筐体は、被加工物を挟持した際、下側筐体の内側に下側筐体と被加工物とで区画された下側閉空間を形成し、下側筐体の一部分には、下側閉空間の内外を連通し下側閉空間からの流体の排出が可能な下側連通孔が形成されている。【選択図】図１