INFRARED SENSOR ELEMENT AND INFRARED SENSOR

To provide an infrared sensor element and an infrared sensor that can prevent an increase in size and improve sensitivity.SOLUTION: An infrared sensor element 11 according to an aspect of the present invention comprises: a heat absorption part 50 that is arranged opposite to a base substrate 21; and...

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1. Verfasser: HISHINUMA KUNIYUKI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide an infrared sensor element and an infrared sensor that can prevent an increase in size and improve sensitivity.SOLUTION: An infrared sensor element 11 according to an aspect of the present invention comprises: a heat absorption part 50 that is arranged opposite to a base substrate 21; and beam parts 51, 52 that project in a first direction intersecting with an opposite direction of the heat absorption part 50 and the base substrate 21 to connect the base substrate 21 and the heat absorption part 50 with each other, wherein the cross-sectional area of a first end connected with the heat absorption part 50 is larger than the cross-sectional area of a second end supported by the base substrate 21.SELECTED DRAWING: Figure 1 【課題】大型化を抑制した上で、感度を向上させることができる赤外線センサ素子及び赤外線センサを提供する。【解決手段】本発明の一態様に係る赤外線センサ素子11は、ベース基板21に対向して配置される熱吸収部50と、熱吸収部50とベース基板21との対向方向に交差する第1方向に突出してベース基板21及び熱吸収部50の間を接続するとともに、熱吸収部50に接続される第1端部の断面積がベース基板21に支持される第2端部の断面積よりも大きい梁部51,52と、を備えている。【選択図】図1