CONVEYANCE SYSTEM

To provide a conveyance system capable of shortening a tact time even if a first substrate and a second substrate are mixedly conveyed, the first substrate requiring processing and the second substrate not requiring processing.SOLUTION: A conveyance system 1 comprises: a first placement part 4 in which a first substrate 100A before processing by a processing unit 10 is placed by a first robot 3; a first transportation carriage 5 which transports a second substrate 100B received from the first robot 3 in a first direction; and a second robot 6 including a traveling function which moves the first substrate 100A placed on the first placement part 4 to the processing unit 10 and places the first substrate 100A processed by the processing unit 10 in a second placement part 7 located in a X1 direction. The second robot 6 travels in the X1 direction to move the processed first substrate 100A to the second placement part 7, receives the second substrate 100B transported by the transportation carriage 5 in the first direction from the transportation carriage 5, and places the received substrate on the second placement part 7.SELECTED DRAWING: Figure 1 【課題】処理が必要な第１基板と処理が不要な第２基板とを混在した状態で搬送しても、タクトタイムを短縮することが可能な搬送システムを提供すること。【解決手段】搬送システム１は、処理部１０での処理前の第１基板１００Ａが第１ロボット３により載置される第１載置部４と、第１ロボット３から受け取った第２基板１００Ｂを第１方向に搬送する搬送キャリッジ５と、第１載置部４にされた第１基板１００Ａを処理部１０に移動させるとともに、処理部１０で処理された処理済みの第１基板１００ＡをＸ１方向に位置する第２載置部７に載置する走行機能付きの第２ロボット６とを有する。第２ロボット６は、Ｘ１方向に走行して、処理済みの第１基板１００Ａを第２載置部７に移動させるとともに、搬送キャリッジ５により第１方向に搬送された第２基板１００Ｂを搬送キャリッジ５から受け取って第２載置部７に載置する。【選択図】図１