MULTI-AXIS LINEAR MOTOR ACTUATOR

To provide a multi-axis linear motor actuator suitable for compactification.SOLUTION: A multi-axis linear motor actuator includes: first and second motor units in which n/2 linear shaft motors 10 are arranged in a row in a plan view and housed in first and second coil fixing members; and first and second dispensing head support members that have n/2 sets of guide units 44, support dispensing heads 40 in a row in a plan view so as to be movable in the central axis direction, and are attached to the first and second motor units. The first and second motor units face each other with the first and second dispensing head support members sandwiched therebetween, and the arrangement of n/2 linear shaft motors in the first motor unit and the arrangement of n/2 linear shaft motors in the second motor unit are combined so as to be staggered in a plan view, and the guide unit of the first dispensing head support member and the guide unit of the second dispensing head support member are adjacent to each other in a plan view and arranged to be alternately adjacent to each other.SELECTED DRAWING: Figure 2 【課題】コンパクト化に適した多軸リニアモータアクチュエータを提供する。【解決手段】リニアシャフトモータ１０をｎ／２個ずつ平面視で一列に並べた状態で第１、第２のコイル固定部材に収容してなる第１、第２のモータユニットと、ｎ／２組のガイド部４４を有して分注ヘッド４０を平面視で一列に並べた状態で中心軸方向に移動可能に支持すると共に、第１、第２のモータユニットに取り付けられる第１、第２の分注ヘッド支持部材と、を有する。第１、第２のモータユニットを、第１、第２の分注ヘッド支持部材を挟んだ状態で対向し、しかも第１のモータユニットにおけるｎ／２個のリニアシャフトモータの配置と第２のモータユニットにおけるｎ／２個のリニアシャフトモータの配置が平面視で千鳥状になるように組み合わせ、第１の分注ヘッド支持部材のガイド部と第２の分注ヘッド支持部材のガイド部とが平面視で隣接し、かつ交互に隣り合うようにした。【選択図】図２