MEASUREMENT DEVICE FOR ELECTRONIC COMPONENT AND METHOD FOR MEASURING ELECTRONIC COMPONENT BY USING THE SAME

To provide a device and a method for a measurement that allow a user to proceed cleaning of such a noise source as dust or oil on a table while seeing the noise source.SOLUTION: A noise source measurement execution button 31 is clicked when a sample W is not placed on the upper surface of a transpar...

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Bibliographische Detailangaben
Hauptverfasser:	HANEDA MAKOTO, NAKAYA SUSUMU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	To provide a device and a method for a measurement that allow a user to proceed cleaning of such a noise source as dust or oil on a table while seeing the noise source.SOLUTION: A noise source measurement execution button 31 is clicked when a sample W is not placed on the upper surface of a transparent table 2, so that such a noise source Ns as dust or skin oil on a transparent table 2 is detected. A cleaning work on the noise source is enabled while a noise source mark Nsm displayed in a monitor 9 is visually recognized and the position of the noise source Ns and the situation of removal are confirmed.SELECTED DRAWING: Figure 3 【課題】塵、埃、脂などのテーブル面のノイズ源を視認しながら、該ノイズ源の清掃作業を進めることを可能とした測定装置及び測定方法を提供する。【解決手段】透明テーブル２の上面に試料Ｗが載置されていない状態で、ノイズ源測定実行ボタン３１をクリックして、透明テーブル２の面の塵、埃、皮脂汚れなどのノイズ源Ｎｓを検出し、モニター９に表示されたノイズ源印Ｎｓｍを視認し、ノイズ源Ｎｓの位置及び除去状況を確認しながら清掃作業を行うことが可能となる。【選択図】図３