INSPECTION DEVICE FOR SEMICONDUCTOR DEVICE AND INSPECTION METHOD FOR SEMICONDUCTOR DEVICE

To provide an inspection device for a semiconductor device and an inspection method for a semiconductor device, by which the stress on a semiconductor substrate where a semiconductor device is formed can be inspected without destruction and with high resolution.SOLUTION: An inspection device 1 inclu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	USUI CHISAKI, KUGE NOBUHITO, FUJIWARA TOSHIHISA, FUJIWARA YUI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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