GAS LASER DEVICE

To provide a gas laser device capable of detecting multiple kinds of abnormalities which cause a decrease in the output of a laser beam.SOLUTION: A gas laser device 100 comprises: a laser oscillation part 20 which generates a laser beam 10 by using gas as a laser medium; and an abnormality detection part which detects a first abnormal state, a second abnormal state, and a third abnormal state of the laser oscillation part 20. The abnormality detection part detects these abnormal states on the basis of: magnitude relationships between the amount of decrease, from a command output, of an output of the laser beam 10 emitted by the laser oscillation part 20, and a first threshold, a second threshold, and a third threshold; and a time length during which each of the relationships is maintained without changing.SELECTED DRAWING: Figure 1 【課題】レーザ光の出力を低下させる複数種類の異常を検出することが可能なガスレーザ装置を得ること。【解決手段】ガスレーザ装置１００は、ガスをレーザ媒質としてレーザ光１０を発生させるレーザ発振部２０と、レーザ発振部２０が出射するレーザ光１０の出力の指令出力からの減少量と第１閾値、第２閾値および第３閾値それぞれとの大小関係、および、大小関係が変化することなく継続する時間の長さ、に基づいて、レーザ発振部２０の第１の異常状態、第２の異常状態および第３の異常状態を検出する異常検出部と、を備える。【選択図】図１