TEMPLATE, METHOD OF MANUFACTURING TEMPLATE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

To provide a template such that a metal film formed on a bottom face of a groove of an alignment pattern is reducible in film thickness, and a method of manufacturing the template.SOLUTION: A template 1 comprises: a substrate which has a principal surface 12; a mesa structure 13 which is provided on...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KOMUKAI TOSHIAKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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