ORGANIC FILM FORMATION DEVICE

To provide an organic film formation device which enables reduction of cooling time of a workpiece formed with an organic film and can maintain the quality of the organic film.SOLUTION: An organic film formation device according to an embodiment may heat a workpiece having a substrate and a solvent containing an organic material, which is applied to an upper surface of the substrate, and a solvent in an atmosphere decompressed to a level lower than the atmospheric pressure. The organic film formation device includes: a chamber which can maintain the atmosphere decompressed to the level lower than the atmospheric pressure; an exhaust part which may exhaust air from the chamber; and at least one temperature control unit having an outer pipe, which presents a cylindrical shape, extends from the outer side of the chamber to the inner side of the chamber, and is inserted into the chamber in an airtight manner, and a heat generating part provided at an internal space of the outer pipe and extending along the outer pipe; and a cooling part which can supply a fluid to the internal space of the outer pipe.SELECTED DRAWING: Figure 3 【課題】有機膜が形成されたワークの冷却時間を短縮することができ、且つ、有機膜の品質を維持することができる有機膜形成装置を提供することである。【解決手段】実施形態に係る有機膜形成装置は、基板と、前記基板の上面に塗布された有機材料と溶媒とを含む溶液と、を有するワークを、大気圧よりも減圧された雰囲気で加熱可能である。有機膜形成装置は、前記大気圧よりも減圧された雰囲気を維持可能なチャンバと、前記チャンバの内部を排気可能な排気部と、筒状を呈し、前記チャンバの外側から前記チャンバの内側に延び、前記チャンバに気密となるように挿通された外管と、前記外管の内部空間に設けられ前記外管に沿って延びる発熱部と、を有する少なくとも１つの温度制御部と、前記外管の内部空間に流体を供給可能な冷却部と、を備えている。【選択図】図３