PURE WATER PRODUCTION APPARATUS AND PURE WATER PRODUCTION METHOD

To provide a pure water production apparatus and a pure water production method capable of grasping an internal state of an ion exchange resin and stably supplying high-quality pure water or ultrapure water.SOLUTION: A pure water production apparatus includes a resin conductivity meter 3 that is arr...

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Hauptverfasser:	TAKAHASHI YOHEI, OBA MASAZUMI, NISHIMURA KIWAMU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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Beschreibung
Zusammenfassung:	To provide a pure water production apparatus and a pure water production method capable of grasping an internal state of an ion exchange resin and stably supplying high-quality pure water or ultrapure water.SOLUTION: A pure water production apparatus includes a resin conductivity meter 3 that is arranged so as to be in contact with an ion exchange resin contained in a mixed bed tower 17 for producing pure water or ultrapure water or polisher devices 24 and 25, and measures a conductivity of the ion exchange resin.SELECTED DRAWING: Figure 1 【課題】イオン交換樹脂の内部状態を把握でき、高品質の純水又は超純水を安定して供給することが可能な純水製造装置及び純水製造方法を提供する。【解決手段】純水又は超純水を製造するための混床塔１７又はポリッシャー装置２４、２５内に収容されるイオン交換樹脂と接触するように配置され、イオン交換樹脂の導電率を測定する樹脂導電率計３を備える。【選択図】図１