DETECTING DEVICE

To provide a detecting device capable of highly precisely performing calibration by acquiring a further accurate calibration curve.SOLUTION: A detecting device includes a load sensor 18 for detecting radial displacement in a prescribed detecting position, a calculation section 25 for calculating a f...

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Hauptverfasser: SATO YUKI, IWABORI TADASHI
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To provide a detecting device capable of highly precisely performing calibration by acquiring a further accurate calibration curve.SOLUTION: A detecting device includes a load sensor 18 for detecting radial displacement in a prescribed detecting position, a calculation section 25 for calculating a flow rate or pressure of the detecting position based on a detection value detected by the load sensor 18, a control section 26 controlling liquid delivery of a liquid flow passage such that the flow rate or pressure of the detecting position in the liquid flow passage becomes a specific value between an upper limit and a lower limit of a control range, and a calibration curve creation section 27 acquiring the detection value by the load sensor 18 in a state where the control section 26 executes such control that the flow rate or pressure of the detecting position in the liquid flow passage becomes a specific value, and using at least two values including the detection value to create a calibration curve D for calibrating the load sensor 18 and the calculation section 25.SELECTED DRAWING: Figure 6 【課題】より正確な検量線を取得することにより精度よく校正することができる検出装置を提供する。【解決手段】所定の検出位置の径方向の変位を検出する荷重センサ18と、荷重センサ18が検出した検出値に基づいて、検出位置の流量又は圧力を算出する算出部25と、液体流路における検出位置の流量又は圧力が、制御範囲の上限値と下限値との間にある特定値となるように、液体流路の送液を制御する制御部26と、液体流路における検出位置の流量又は圧力が特定値となるよう制御部26が制御した状態で、荷重センサ18による検出値を取得し、当該検出値を含む少なくとも2つの値を用いることによって、荷重センサ18及び算出部25を校正するための検量線Dを作成する検量線作成部27と、を具備する検出装置である。【選択図】図6