SEMICONDUCTOR DEVICE

To provide a suitable semiconductor device even in the case of using a SiC substrate for a semiconductor chip.SOLUTION: A semiconductor device comprises: a semiconductor chip 30 with an element formed on a SiC substrate; a pair of heat sinks 40 and 50, making heat dissipation members and disposed so...

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Bibliographische Detailangaben
Hauptverfasser: INABA YUKI, YAMAGISHI TETSUTO, YOSHIKAWA HIROKI, SAKAMOTO ZENJI, KAIZU RYOICHI
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To provide a suitable semiconductor device even in the case of using a SiC substrate for a semiconductor chip.SOLUTION: A semiconductor device comprises: a semiconductor chip 30 with an element formed on a SiC substrate; a pair of heat sinks 40 and 50, making heat dissipation members and disposed so as to hold the semiconductor chip 30 therebetween, and a terminal 60; and solder 90, 91, 92 interposed between the semiconductor chip and the heat dissipation members, and forming connecting portions. The solder 90, 91 is composed of a lead-free solder having an alloy composition, and containing Ag of 3.2-3.8 mass%, Cu of 0.6-0.8 mass%, and Ni of 0.01-0.2 mass%, Sb and Bi so as to satisfy x+2y≤11 mass%, x+14y≤42 mass% and x≥5.1 mass% supposing an Sb content of x mass% and a Bi content of y mass%, Co of 0.001-0.3 mass%, and P of 0.001-0.2 mass% with the balance consisting of Sn.SELECTED DRAWING: Figure 7 【課題】半導体チップにSiC基板を用いた場合でも好適な半導体装置を提供すること。【解決手段】半導体装置は、SiC基板に素子が形成された半導体チップ30と、半導体チップ30を挟むように配置された放熱部材であるヒートシンク40、50およびターミナル60と、半導体チップと放熱部材との間に介在して接合部を形成するはんだ90、91、92を備えている。はんだ90、91は、Agを3.2~3.8質量%、Cuを0.6~0.8質量%、Niを0.01~0.2質量%含むとともに、Sbの含有量をx質量%、Biの含有量をy質量%とすると、x+2y≦11質量%、x+14y≦42質量%、及び、x≧5.1質量%を満たすようにSbとBiを含み、さらに、Coを0.001~0.3質量%、Pを0.001~0.2質量%含み、残部がSnからなる合金組成の鉛フリーはんだである。【選択図】図7