JIG

To enable a load applying mechanism to be inserted between the upper surface of a table and the lower surface of an abrasive pad when a load value detected by a load sensor is corrected.SOLUTION: A jig 6 used in a processing device including: means 4 that applies a load to a workpiece and processes the workpiece; and load sensors 81 to 83 each of which is disposed on the processing means 4 and detects a reaction force of the load received by the workpiece. The jig includes: a plate 60 that is placed on hold means 50; an air cylinder 62 disposed on an upper surface of the plate 60; and a regulator 64 that adjusts a pressure of air to be supplied to the air cylinder 62. The air cylinder 62 includes: a piston 622 in which air is supplied into a cylinder tube 620 and a lower surface thereof is pushed by air to slide within the cylinder tube 620; and a rod 624 connected to the piston 622. The processing means 4 is pushed up with a force whose value is determined by a pressure of air supplied to the cylinder tube 620 and an area of the lower surface of the piston 622, and a value of the load detected by the load sensors 81 to 83 is measured.SELECTED DRAWING: Figure 2 【課題】荷重センサが検知する荷重値の補正を行う場合、荷重付与機構をテーブル上面と研磨パッド下面との間に進入可能とする。【解決手段】被加工物に荷重を付与し加工する手段４と、加工手段４に配置され被加工物が受ける荷重の反力を検知する荷重センサ８１～８３と、を備える加工装置で使用され、保持手段５０に載置するプレート６０と、プレート６０上面に配置されたエアシリンダ６２と、エアシリンダ６２に供給するエアの圧力を調整するレギュレータ６４と、を備え、エアシリンダ６２は、エアがシリンダチューブ６２０内に供給され下面がエアに押されてシリンダチューブ６２０内を摺動するピストン６２２と、ピストン６２２に連結されるロッド６２４と、を備え、シリンダチューブ６２０に供給されたエアの圧力とピストン６２２下面の面積とで値が定まる力で加工手段４を押し上げ荷重センサ８１～８３が検知する荷重の値を測定する治具６。【選択図】図２