SUBSTRATE WITH FILM, SUBMOUNT AND OPTICAL DEVICE

To provide a substrate with a film that can be suppressed from warping.SOLUTION: There is provided a substrate 1 with a film that is used for a submount to be mounted with an optical element, and also has a first principal surface 2a and a second principal surface 2b opposed to each other. Further,...

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Bibliographische Detailangaben
Hauptverfasser:	TOYOFUKU NAOKI, YAMAGUCHI YOSHIMASA, FUJITA HIROKI, TANAKA HIROKAZU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	To provide a substrate with a film that can be suppressed from warping.SOLUTION: There is provided a substrate 1 with a film that is used for a submount to be mounted with an optical element, and also has a first principal surface 2a and a second principal surface 2b opposed to each other. Further, the substrate 1 with the film comprises a substrate 2 and a stress adjustment film 4 which is arranged on at least one principal surface 2a between the first principal surface 2a and second principal surface 2b of the substrate 2.SELECTED DRAWING: Figure 1 【課題】反りを抑制することができる、膜付き基板を提供する。【解決手段】光学素子を搭載するためのサブマウントに用いられる膜付き基板１であって、対向している第１の主面２ａ及び第２の主面２ｂを有する、基板２と、基板２の第１の主面２ａ及び第２の主面２ｂのうち少なくとも一方の主面２ａ上に配置されている、応力調整膜４と、を備える、膜付き基板１。【選択図】図１