PIEZOELECTRIC ELEMENT
To provide a piezoelectric element in which the influence of residual stress in a piezoelectric film is suppressed and which has an improved signal-to-noise ratio.SOLUTION: The piezoelectric element comprise a diaphragm 2 in which piezoelectric films 5a, 5b supported by a support substrate 3 are div...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide a piezoelectric element in which the influence of residual stress in a piezoelectric film is suppressed and which has an improved signal-to-noise ratio.SOLUTION: The piezoelectric element comprise a diaphragm 2 in which piezoelectric films 5a, 5b supported by a support substrate 3 are divided by a slit 1 of a desired shape. An extendable film 10 is arranged to cover the slit 1. The extendable film 10 comprises a first covering portion 10a which covers a part of one side of the diaphragm 2, a second covering portion 10b which covers a part of the other side of the diaphragm 2, and a connecting portion 10c which penetrates the diaphragm 2 and is connected to the first covering portion 10a and the second covering portion 10b.SELECTED DRAWING: Figure 1
【課題】圧電膜の残留応力の影響を抑制するとともに、高感度で信号雑音比を改善した圧電素子を提供する。【解決手段】圧電素子は、支持基板３に支持された圧電膜５ａ、５ｂを所望の形状のスリット１で区画した振動板２を備え、スリット１を覆うように伸縮膜１０を配置する。この伸縮膜１０は、振動板２の一方の面の一部を覆う第１の被覆部１０ａと、振動板２の他方の面の一部を覆う第２の被覆部１０ｂと、振動板２を貫通して第１の被覆部１０ａと第２の被覆部１０ｂとに接続する連結部１０ｃとを備えている。【選択図】図１ |
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