SUBSTRATE HOUSING CONTAINER
To provide a substrate housing container which can suppress flowing of dust into an upper part inside a container body together with air when a lid body is removed while observing standardized standard, does not need to change a shape or configuration of the container body in particular, and can exp...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a substrate housing container which can suppress flowing of dust into an upper part inside a container body together with air when a lid body is removed while observing standardized standard, does not need to change a shape or configuration of the container body in particular, and can expect improvement in quality of a substrate without considerably modifying a mold for the container body.SOLUTION: A substrate housing container includes: a container body 1 for housing a semiconductor wafer; a lid body 10 engaging a front surface 2 of the container body 1; and a windbreak member 20 housed in the container body 1. On both sides inside the container body 1, a plurality of support pieces 5 supporting the semiconductor wafer are provided opposite and arranged in a vertical direction. The windbreak member 20 is provided with: a windbreak plate 21 which is supported by the pair of support pieces 5 on an uppermost stage of the container body 1 and faces an internal upper surface of the container body 1; a wind shield wall 25 which is stood on a front end part of the windbreak plate 21 and suppresses flowing of particles into a gap between the internal upper surface and the windbreak plate 21 of the container body 1 together with the clean air when the lid body 10 is removed; and an engaging mechanism 26 engaging the windbreak plate 21 within the container body 1 by using elasticity.SELECTED DRAWING: Figure 2
【課題】標準化規格を遵守しながら蓋体取り外し時に塵埃が気体と共に容器本体内部上方に流入するのを抑制でき、容器本体の形状や構造を特に変更する必要がなく、容器本体用金型を大幅に改造することなく基板の品質向上が期待できる基板収納容器を提供する。【解決手段】半導体ウェーハ収納用の容器本体1と、容器本体1の正面2に嵌合される蓋体10と、容器本体1に収納される防風部材20とを備え、容器本体1の内部両側に、半導体ウェーハを支持する複数の支持片5を対設して上下方向に配列し、防風部材20は、容器本体1の最上段における一対の支持片5に支持されて容器本体1の内部上面に対向する防風板21と、防風板21の前端部に立設されて蓋体10取り外し時にパーティクルが清浄空気と共に容器本体1の内部上面と防風板21間の隙間に流入するのを抑制する防風壁25と、防風板21を容器本体1内に弾性を用いて係止する係止機構26とを備える。【選択図】図2 |
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