MAGNETIC RESISTANCE ELEMENT AND MANUFACTURING METHOD THEREOF

To provide a giant magnetoresistive (GMR) device for use in a magnetic multi-turn sensor.SOLUTION: In a giant magnetoresistive (GMR) element, a free layer, that is, a layer that changes the magnetization direction in response to an external magnetic field to cause a resistance change is thick enough...

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Hauptverfasser: CIAN P O DALAIGH, ONUR NECDET URS, ENNO LAGE, JAN KUBIK, MD TAREQUZZAMAN, JOCHEN SCHMITT
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide a giant magnetoresistive (GMR) device for use in a magnetic multi-turn sensor.SOLUTION: In a giant magnetoresistive (GMR) element, a free layer, that is, a layer that changes the magnetization direction in response to an external magnetic field to cause a resistance change is thick enough for providing good shape anisotropy without exhibiting the AMR effect. To achieve this, at least a portion of the free layer includes a plurality of layers of at least two different materials, specifically, a plurality of layers of at least a first material that is ferromagnetic, and a plurality of layers of at least a second material that are known not to exhibit an AMR effect and do not interfere with the GMR effect of the layer of a ferromagnetic material.SELECTED DRAWING: Figure 2 【課題】本開示は、磁気マルチターンセンサにおいて使用するための巨大磁気抵抗(GMR)素子を提供する。【解決手段】巨大磁気抵抗(GMR)素子において、自由層、つまり、抵抗変化をもたらすように外部磁場に応じてその磁化方向を変化させる層は、AMR効果を呈することなく良好な形状異方性を提供するに十分な厚さである。これを達成するために、自由層の少なくとも一部は、少なくとも2つの異なる材料の複数の層、具体的には、強磁性である少なくとも第1の材料よりなる複数の層、およびAMR効果を呈しないことが知られており、かつ、強磁性材料の層のGMR効果に干渉しない少なくとも第2の材料の複数の層を含む。【選択図】図2