PROBE HOLDER
To provide a probe holder capable of improving the followability of a probe to a change in the shape of the surface of a test object.SOLUTION: A probe holder 12, which is moved by a moving device and holds an eddy-current probe 11 so that it is brought into contact with the surface of a corner porti...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a probe holder capable of improving the followability of a probe to a change in the shape of the surface of a test object.SOLUTION: A probe holder 12, which is moved by a moving device and holds an eddy-current probe 11 so that it is brought into contact with the surface of a corner portion 3 of a nozzle 2, comprises: a holder member 21 that is connected to the moving device, and that linearly extends; a holder member 22 that extends so as to form an arc along the surface of the corner portion 3 of the nozzle 2, and that holds the eddy-current probe 11; a hinge mechanism 23 that connects an end of the holder member 21 and an end of the holder member 22 so that the holder member 22 is rotatable with respect to the holder member 21; a pressing member 24 that applies pressing force, for pressing the eddy-current probe 11 to the surface of the corner portion 3 of the nozzle 2, to the holder member 22; and a stopper mechanism 25 that limits the rotation range of the holder member 22.SELECTED DRAWING: Figure 8
【課題】被検体の表面の形状変化に対するプローブの追従性を向上することができるプローブホルダを提供する。【解決手段】移動装置によって移動され、ノズル2のコーナ部3の表面に接触させるように渦電流プローブ11を保持するプローブホルダ12において、移動装置に接続され、直線状に延在するホルダ部材21と、ノズル2のコーナ部3の表面に沿って円弧状に延在すると共に、渦電流プローブ11を保持するホルダ部材22と、ホルダ部材21に対してホルダ部材22が回動可能なように、ホルダ部材21の端部とホルダ部材22の端部を連結するヒンジ機構23と、渦電流プローブ11をノズル2のコーナ部3の表面に押付けるための押付力をホルダ部材22に付与する押付部材24と、ホルダ部材22の回動範囲を制限するストッパ機構25とを備える。【選択図】図8 |
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