VIBRATION ELEMENT, OSCILLATOR, ELECTRONIC APPARATUS, AND MOBILE

To provide: a vibration element capable of performing highly accurate temperature compensation and an oscillator including the vibration element; an electronic apparatus; and a mobile.SOLUTION: A vibration element 1 includes: a crystal substrate 2 having a first vibration part 3, a second vibration part 5 and a third vibration part 7; a pair of first excitation electrodes 4 formed on both main surfaces 16a, 16b of the crystal substrate 2, respectively; a pair of second excitation electrodes 6 formed so as to sandwich the second vibration part 5 in a thickness direction of the crystal substrate 2; and a pair of third excitation electrodes 8 formed so as to sandwich the third vibration part 7 in the thickness direction of the crystal substrate 2. The second excitation electrode 6 that is at least one of the pair of second excitation electrodes 6 is formed on a first inclined surface 17 inclined with respect to both main surfaces, and the third excitation electrode 8 that is at least one of the pair of third excitation electrodes 8 is formed on a second inclined surface 18 inclined with respect to both main surfaces. The second inclined surface 18 is inclined with respect to the first inclined surface 17.SELECTED DRAWING: Figure 2 【課題】高精度な温度補償を行うことができる振動素子及びこの振動素子を備えた発振器、電子機器、移動体を提供する。【解決手段】振動素子１は、第１振動部３と第２振動部５と第３振動部７とを有する水晶基板２と、水晶基板２の両主面１６ａ，１６ｂに形成されている一対の第１励振電極４と、第２振動部５を水晶基板２の厚さ方向に挟むように形成されている一対の第２励振電極６と、第３振動部７を水晶基板２の厚さ方向に挟むように形成されている一対の第３励振電極８と、を備え、一対の第２励振電極６のうちの少なくとも一方の第２励振電極６は、両主面に対して傾斜している第１傾斜面１７に形成され、一対の第３励振電極８のうちの少なくとも一方の前記第３励振電極８は、両主面に対して傾斜している第２傾斜面１８に形成され、第２傾斜面１８は、第１傾斜面１７に対して傾斜している。【選択図】図２