PROBER
To suppress an abbe error that must be taken into consideration when positioning a test head which requires high accuracy.SOLUTION: A prober includes a transport area where a transport unit is arranged and a measurement area where multiple measurement units are arranged, and test heads are respectiv...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng ; jpn |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | To suppress an abbe error that must be taken into consideration when positioning a test head which requires high accuracy.SOLUTION: A prober includes a transport area where a transport unit is arranged and a measurement area where multiple measurement units are arranged, and test heads are respectively arranged in the multiple measurement units, and the test heads are configured to be able to be pulled out on the side opposite to the transport area, and a transport direction of a transport object to be transported by the transport unit to the measurement unit at the transport destination and a pull-out direction of the test head are arranged in a straight line.SELECTED DRAWING: Figure 14
【課題】高精度が求められるテストヘッドの位置決めの際に考慮しなくてはならないアッベ誤差を抑制する。【解決手段】搬送ユニットが配される搬送エリアと、複数の測定部が配される測定エリアと、を備え、複数の測定部にはそれぞれテストヘッドが配置され、テストヘッドは搬送エリアとは反対側に引き出し可能に構成され、搬送ユニットが搬送先の測定部に搬送する搬送物の搬送方向と、テストヘッドの引き出し方向とが一直線状である。【選択図】図１４ |
|---|