LASER BEAM MACHINING HEAD AND LASER BEAM MACHINING DEVICE

To properly grasp that optical characteristics of a laser beam are varied.SOLUTION: A beam diameter of a laser beam LB reflected by a first beam splitter 23 is detected by a first image detection part 25. A beam diameter of the laser beam LB reflected by a second beam splitter 24 is detected by a se...

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1. Verfasser: NARUMI KEIJI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To properly grasp that optical characteristics of a laser beam are varied.SOLUTION: A beam diameter of a laser beam LB reflected by a first beam splitter 23 is detected by a first image detection part 25. A beam diameter of the laser beam LB reflected by a second beam splitter 24 is detected by a second image detection part 26. In a calculation part 31, a variation amount of a focal position of the laser beam LB and a variation amount of power of the laser beam LB are calculated on the basis of detection results of the first image detection part 25 and the second image detection part 26. In a determination part 32, the state of an optical system is determined on the basis of the calculation results by the calculation part 31.SELECTED DRAWING: Figure 2 【課題】レーザ光の光特性が変動したことを適切に把握できるようにする。【解決手段】第1ビームスプリッタ23で反射されたレーザ光LBのビーム径が第1画像検出部25で検出される。第2ビームスプリッタ24で反射されたレーザ光LBのビーム径が第2画像検出部26で検出される。演算部31では、第1画像検出部25及び第2画像検出部26の検出結果に基づいて、レーザ光LBの焦点位置の変動量と、レーザ光LBのパワーの変動量とが演算される。判定部32では、演算部31の演算結果に基づいて、光学系の状態が判定される。【選択図】図2