TURBOMOLECULAR PUMP AND STATOR OF TURBOMOLECULAR PUMP
To provide a turbomolecular pump capable of suppressing deterioration in an exhaust performance due to backflow of gas molecules.SOLUTION: A turbomolecular pump comprises: multi-stage rotor blades in which a plurality of blades is formed, and which are provided in a pump axial direction; and multi-s...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng ; jpn |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | YASUDA TOMOKI |
| description | To provide a turbomolecular pump capable of suppressing deterioration in an exhaust performance due to backflow of gas molecules.SOLUTION: A turbomolecular pump comprises: multi-stage rotor blades in which a plurality of blades is formed, and which are provided in a pump axial direction; and multi-stage stator blades 30 which are alternately arranged in the pump axial direction with respect to the multi-stage rotor blades, and provided with a plurality of blades 301. The stator blade 30 of each stage is composed of a plurality of divided stator blades 30a and 30b. In an opposite part of the plurality of divided stator blades 30a, 30b, a gap 305 is formed. The stator blades 30 of the respective stages adjacent to each other in the pump axial direction are out of a phase with each other in a circumferential direction of the gap 305.SELECTED DRAWING: Figure 3
【課題】気体分子逆流による排気性能低下を抑制することができるターボ分子ポンプの提供。【解決手段】ターボ分子ポンプは、複数のブレードが形成され、ポンプ軸方向に設けられた複数段のロータ翼と、複数段のロータ翼に対してポンプ軸方向に交互に配置され、複数のブレード３０１が設けられた複数段のステータ翼３０と、を備え、各段のステータ翼３０は、複数の分割ステータ翼３０ａ，３０ｂから構成され、複数の分割ステータ翼３０ａ，３０ｂの対向部には隙間３０５が形成されており、ポンプ軸方向に隣接する各段のステータ翼３０は、隙間３０５の周方向位相が互いにずれている。【選択図】図３ |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2021173257A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2021173257A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2021173257A3</originalsourceid><addsrcrecordid>eNrjZDANCQ1y8vf193F1DvVxDFIICPUNUHD0c1EIDnEM8Q9S8HdTwKKCh4E1LTGnOJUXSnMzKLm5hjh76KYW5MenFhckJqfmpZbEewUYGRgZGpobG5maOxoTpQgAaa8odQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>TURBOMOLECULAR PUMP AND STATOR OF TURBOMOLECULAR PUMP</title><source>esp@cenet</source><creator>YASUDA TOMOKI</creator><creatorcontrib>YASUDA TOMOKI</creatorcontrib><description>To provide a turbomolecular pump capable of suppressing deterioration in an exhaust performance due to backflow of gas molecules.SOLUTION: A turbomolecular pump comprises: multi-stage rotor blades in which a plurality of blades is formed, and which are provided in a pump axial direction; and multi-stage stator blades 30 which are alternately arranged in the pump axial direction with respect to the multi-stage rotor blades, and provided with a plurality of blades 301. The stator blade 30 of each stage is composed of a plurality of divided stator blades 30a and 30b. In an opposite part of the plurality of divided stator blades 30a, 30b, a gap 305 is formed. The stator blades 30 of the respective stages adjacent to each other in the pump axial direction are out of a phase with each other in a circumferential direction of the gap 305.SELECTED DRAWING: Figure 3
【課題】気体分子逆流による排気性能低下を抑制することができるターボ分子ポンプの提供。【解決手段】ターボ分子ポンプは、複数のブレードが形成され、ポンプ軸方向に設けられた複数段のロータ翼と、複数段のロータ翼に対してポンプ軸方向に交互に配置され、複数のブレード３０１が設けられた複数段のステータ翼３０と、を備え、各段のステータ翼３０は、複数の分割ステータ翼３０ａ，３０ｂから構成され、複数の分割ステータ翼３０ａ，３０ｂの対向部には隙間３０５が形成されており、ポンプ軸方向に隣接する各段のステータ翼３０は、隙間３０５の周方向位相が互いにずれている。【選択図】図３</description><language>eng ; jpn</language><subject>BLASTING ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; NON-POSITIVE DISPLACEMENT PUMPS ; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS ; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ; WEAPONS</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20211101&DB=EPODOC&CC=JP&NR=2021173257A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20211101&DB=EPODOC&CC=JP&NR=2021173257A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YASUDA TOMOKI</creatorcontrib><title>TURBOMOLECULAR PUMP AND STATOR OF TURBOMOLECULAR PUMP</title><description>To provide a turbomolecular pump capable of suppressing deterioration in an exhaust performance due to backflow of gas molecules.SOLUTION: A turbomolecular pump comprises: multi-stage rotor blades in which a plurality of blades is formed, and which are provided in a pump axial direction; and multi-stage stator blades 30 which are alternately arranged in the pump axial direction with respect to the multi-stage rotor blades, and provided with a plurality of blades 301. The stator blade 30 of each stage is composed of a plurality of divided stator blades 30a and 30b. In an opposite part of the plurality of divided stator blades 30a, 30b, a gap 305 is formed. The stator blades 30 of the respective stages adjacent to each other in the pump axial direction are out of a phase with each other in a circumferential direction of the gap 305.SELECTED DRAWING: Figure 3
【課題】気体分子逆流による排気性能低下を抑制することができるターボ分子ポンプの提供。【解決手段】ターボ分子ポンプは、複数のブレードが形成され、ポンプ軸方向に設けられた複数段のロータ翼と、複数段のロータ翼に対してポンプ軸方向に交互に配置され、複数のブレード３０１が設けられた複数段のステータ翼３０と、を備え、各段のステータ翼３０は、複数の分割ステータ翼３０ａ，３０ｂから構成され、複数の分割ステータ翼３０ａ，３０ｂの対向部には隙間３０５が形成されており、ポンプ軸方向に隣接する各段のステータ翼３０は、隙間３０５の周方向位相が互いにずれている。【選択図】図３</description><subject>BLASTING</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>NON-POSITIVE DISPLACEMENT PUMPS</subject><subject>POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS</subject><subject>PUMPS FOR LIQUIDS OR ELASTIC FLUIDS</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDANCQ1y8vf193F1DvVxDFIICPUNUHD0c1EIDnEM8Q9S8HdTwKKCh4E1LTGnOJUXSnMzKLm5hjh76KYW5MenFhckJqfmpZbEewUYGRgZGpobG5maOxoTpQgAaa8odQ</recordid><startdate>20211101</startdate><enddate>20211101</enddate><creator>YASUDA TOMOKI</creator><scope>EVB</scope></search><sort><creationdate>20211101</creationdate><title>TURBOMOLECULAR PUMP AND STATOR OF TURBOMOLECULAR PUMP</title><author>YASUDA TOMOKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2021173257A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2021</creationdate><topic>BLASTING</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>NON-POSITIVE DISPLACEMENT PUMPS</topic><topic>POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS</topic><topic>PUMPS FOR LIQUIDS OR ELASTIC FLUIDS</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>YASUDA TOMOKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YASUDA TOMOKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>TURBOMOLECULAR PUMP AND STATOR OF TURBOMOLECULAR PUMP</title><date>2021-11-01</date><risdate>2021</risdate><abstract>To provide a turbomolecular pump capable of suppressing deterioration in an exhaust performance due to backflow of gas molecules.SOLUTION: A turbomolecular pump comprises: multi-stage rotor blades in which a plurality of blades is formed, and which are provided in a pump axial direction; and multi-stage stator blades 30 which are alternately arranged in the pump axial direction with respect to the multi-stage rotor blades, and provided with a plurality of blades 301. The stator blade 30 of each stage is composed of a plurality of divided stator blades 30a and 30b. In an opposite part of the plurality of divided stator blades 30a, 30b, a gap 305 is formed. The stator blades 30 of the respective stages adjacent to each other in the pump axial direction are out of a phase with each other in a circumferential direction of the gap 305.SELECTED DRAWING: Figure 3
【課題】気体分子逆流による排気性能低下を抑制することができるターボ分子ポンプの提供。【解決手段】ターボ分子ポンプは、複数のブレードが形成され、ポンプ軸方向に設けられた複数段のロータ翼と、複数段のロータ翼に対してポンプ軸方向に交互に配置され、複数のブレード３０１が設けられた複数段のステータ翼３０と、を備え、各段のステータ翼３０は、複数の分割ステータ翼３０ａ，３０ｂから構成され、複数の分割ステータ翼３０ａ，３０ｂの対向部には隙間３０５が形成されており、ポンプ軸方向に隣接する各段のステータ翼３０は、隙間３０５の周方向位相が互いにずれている。【選択図】図３</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng ; jpn |
| recordid | cdi_epo_espacenet_JP2021173257A |
| source | esp@cenet |
| subjects | BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS |
| title | TURBOMOLECULAR PUMP AND STATOR OF TURBOMOLECULAR PUMP |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-06T08%3A20%3A34IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=YASUDA%20TOMOKI&rft.date=2021-11-01&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2021173257A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |