SURFACE PROCESSING DEVICE AND SURFACE PROCESSING METHOD

To provide a surface processing device whose cost can be suppressed while improving processing efficiency and a surface processing method.SOLUTION: A surface processing device 1 according to the present invention comprises: a beam irradiation unit 3 that irradiates some range on a surface of a work-...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAGAHAMA TAKAYA, MIZOGUCHI TAKASHI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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