HOLDING DEVICE AND MANUFACTURING METHOD THEREOF

To provide a holding device and a manufacturing method thereof which can suppress temperature variation on the holding surface for holding an object and prevent cracks from occurring in a holding member.SOLUTION: A holding device includes a holding member 10 having a holding surface 11 and formed of a ceramic sintered body containing aluminum nitride as a main component, a metal heating resistor 15 arranged inside the holding member 10, a conductive power receiving electrode 42 in contact with the heating resistor 15, and a conductive terminal member 40 electrically connected to the power receiving electrode 42, and in the heating device 1 that holds an object on the holding surface 11 of the holding member 10, in the surface of the power receiving electrode 42, at least a part of the connecting surface with the terminal member 40 is covered with a first coat layer 61 formed of a nitride containing at least one of Ti, Zr, V, Ta, and Nb.SELECTED DRAWING: Figure 3 【課題】対象物を保持する保持面における温度バラツキを抑制するとともに、保持部材にクラックが発生することを防止できる保持装置及び保持装置の製造方法を提供すること。【解決手段】保持面１１を有し、窒化アルミニウムを主成分とするセラミックス焼結体により形成された保持部材１０と、保持部材１０の内部に配置された金属製の発熱抵抗体１５と、発熱抵抗体１５と接する導電性の受電電極４２と、受電電極４２と電気的に接続された導電性の端子部材４０と、を備え、保持部材１０の保持面１１上に対象物を保持する加熱装置１において、受電電極４２の表面のうち、端子部材４０との接続面の少なくとも一部が、ＴｉとＺｒとＶとＴａとＮｂとの少なくとも１つを含有する窒化物により形成された第１コート層６１に覆われている。【選択図】図３