GAS CONCENTRATION MEASURING DEVICE
To provide a gas concentration measuring device which is zero drift free and has a short response time.SOLUTION: The volume of a vibration space 8b is increased or decreased by a drive frequency to generate pressure vibration, measurement light is transmitted, the light is received by a light receiv...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide a gas concentration measuring device which is zero drift free and has a short response time.SOLUTION: The volume of a vibration space 8b is increased or decreased by a drive frequency to generate pressure vibration, measurement light is transmitted, the light is received by a light receiver 15b, the amount of light vibrating at a drive frequency of light of an absorption wavelength is detected, and a gas concentration is calculated after the detected light is converted to an electric signal.SELECTED DRAWING: Figure 2
【課題】ゼロドリフト・フリーと、短時間応答のガス濃度測定装置を提供する。【解決手段】振動空間８ｂの容積を駆動周波数で増減させて圧力振動を生成し、測定光を透過させ、受光器１５ｂで受光して吸収波長の光の駆動周波数で振動する光量を検出し、電気信号に変換してからガス濃度を求める。【選択図】図２ |
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