SENSOR ELEMENT AND GAS SENSOR

To provide a sensor element which offers stable oscillation characteristics and improved sensitivity, and a gas sensor.SOLUTION: A sensor element is provided, comprising a quartz oscillator, a first electrode, a second electrode, and a sensitive film. The quartz oscillator has a first surface with a...

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Bibliographische Detailangaben
Hauptverfasser:	ASHIZAWA HIDENORI, HATTORI MASASHI, KANETO HIROMITSU, AKINO SHINJI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	To provide a sensor element which offers stable oscillation characteristics and improved sensitivity, and a gas sensor.SOLUTION: A sensor element is provided, comprising a quartz oscillator, a first electrode, a second electrode, and a sensitive film. The quartz oscillator has a first surface with a surface roughness of 0.19-0.36 μm, inclusive, and a second surface. The first electrode is provided on the first surface. The second electrode is provided on the second surface. The sensitive film is provided on the first electrode.SELECTED DRAWING: Figure 1 【課題】安定した発振特性を有しつつ、感度が向上するセンサ素子及びガスセンサを提供することにある。【解決手段】センサ素子は、水晶振動子と、第１の電極と、第２の電極と、感応膜とを備える。上記水晶振動子は、表面粗さが０．１９μｍ以上０．３６μｍ以下の第１の面と、第２の面とを有する。上記第１の電極は、上記第１の面に設けられる。上記第２の電極は、上記第２の面に設けられる。上記感応膜は、上記第１の電極上に設けられる。【選択図】図１