ARTICLE INSPECTION DEVICE AND ARTICLE INSPECTION METHOD

To provide an article inspection device and an article inspection method, with which it is possible to suppress the delay time used for computation of a time delay integration from being restricted and improve the accuracy of inspection.SOLUTION: An X-ray inspection device 1 as an article inspection...

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1. Verfasser: OHASHI TADASHI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide an article inspection device and an article inspection method, with which it is possible to suppress the delay time used for computation of a time delay integration from being restricted and improve the accuracy of inspection.SOLUTION: An X-ray inspection device 1 as an article inspection device comprises: an X-ray irradiation unit 11 for irradiating a moving inspection object W with an X-ray as an electromagnetic wave expanding in radial form; and an X-ray line sensor 15 for detecting the X-ray having suffered the influence of the inspection object W by a plurality of detection elements 15a which are arrayed in a main scan direction (Y direction) orthogonal to the movement direction of the inspection object W (X direction) and in the movement direction. The X-ray inspection device 1 includes a control circuit 36 as a delay time setting unit and a TDI image generation unit. The control circuit 36 sets a plurality of delay times on the basis of a prescribed reference delay time t, executes a time delay integration process of adding up the detection data detected by the X-ray line sensor 15 using the plurality of delay times, and generates a plurality of TDI images that correspond to the plurality of delay times.SELECTED DRAWING: Figure 2 【課題】時間遅延積分の演算に用いる遅延時間が制約されることを抑制でき、検査精度を向上させることができる物品検査装置および物品検査方法を提供すること。【解決手段】物品検査装置としてのX線検査装置1は、移動する被検査物Wに放射状に広がる電磁波としてのX線を照射するX線照射部11と、被検査物Wの移動方向(X方向)に直交する主走査方向(Y方向)と移動方向とに配列された複数の検出素子15aにより被検査物Wの影響を受けたX線を検出するX線ラインセンサ15と、を備える。X線検査装置1は遅延時間設定部およびTDI画像生成部としての制御回路36を備えている。制御回路36は、所定の基準遅延時間tに基づいて複数の遅延時間を設定し、X線ラインセンサ15が検出した検出データを複数の遅延時間を用いて加算する時間遅延積分処理を実施し、複数の遅延時間に応じた複数のTDI画像を生成する。【選択図】図2