VACUUM PUMP AND METHOD FOR MONITORING VACUUM PUMP

To provide means for monitoring the state of a vacuum pump or a vacuum system comprising at least one vacuum pump reliably at low cost.SOLUTION: The invention relates to a vacuum pump 11 or to a vacuum system 12 comprising at least one vacuum pump, which comprises an inertial measuring unit 14 assoc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	DANIEL SIEBEN, ADRIAN WIRTH, BOETTCHER JOCHEN, SCHWEIGHOEFER MICHAEL, STOLL TOBIAS, VIKTOR DORSCHT, MEKOTA MIRKO, HERBERT STAMMLER, PASCAL WIELSCH
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	To provide means for monitoring the state of a vacuum pump or a vacuum system comprising at least one vacuum pump reliably at low cost.SOLUTION: The invention relates to a vacuum pump 11 or to a vacuum system 12 comprising at least one vacuum pump, which comprises an inertial measuring unit 14 associated with the vacuum pump. The inertial measuring unit comprises at least one inertial sensor 16. The inertial measurement sensor is configured to acquire the movement of the vacuum pump and/or the orientation of the vacuum pump, and provide measurement data related thereto and/or information obtained by evaluating the measurement data.SELECTED DRAWING: Figure 6 【課題】確実でかつ低コストである真空ポンプ又は少なくとも１つの真空ポンプを含む真空システムの状態監視のための手段を提供する。【解決手段】真空ポンプ１１又は少なくとも１つの真空ポンプを有する真空システム１２において、真空ポンプに対応付けられた慣性計測ユニット１４を備え、慣性計測ユニットは、少なくとも１つの慣性センサ１６を有し、慣性計測センサは、真空ポンプの動き及び／又は真空ポンプの配向を取得し、これに関する計測データ、及び／又は計測データの判定によって得られる情報を提供するように構成されている。【選択図】図６