MAGNETIC SENSOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND ROTARY OPERATION MECHANISM

To provide a magnetic sensor device capable of detecting a magnetic field in three axial direction with a high degree of accuracy, a method for manufacturing the same, and a rotary operation mechanism.SOLUTION: A magnetic sensor device comprises: a first surface; a second surface positioned on the opposite side of the first surface; first and second inclined surfaces inclined with respect to the first surface; first to third magnetic sensor portions for detecting magnetisms in first to third axial directions; and a signal processing unit performing signal processing on the basis of first to third sensor signals output from the first to third magnetic sensor portions. The first axial direction is orthogonal to the first surface; the second and third axial directions are orthogonal to each other on the first surface; the first magnetic sensor portion is provided on the first inclined surface; the second magnetic sensor portion is provided on the second inclined surface; and the signal processing unit includes a correction signal formation unit forming first and second correction signals obtained by correcting the first and second sensor signals according to the inclination angle of the first inclined surface and the inclination angle of the second inclined surface.SELECTED DRAWING: Figure 4 【課題】３軸方位の磁界を高精度に検出可能な磁気センサ装置及びその製造方法、並びに回転動作機構を提供する。【解決手段】磁気センサ装置は、第１面及びその反対側に位置する第２面、並びに第１面に対して傾斜する第１傾斜面及び第２傾斜面と、第１〜第３軸方向の磁気を検出するための第１〜第３磁気センサ部と、第１〜第３磁気センサ部から出力される第１〜第３センサ信号に基づいて信号処理を行う信号処理部とを備え、第１軸方向は、第１面に直交する方向であり、第２軸方向及び第３軸方向は、第１面上において相互に直交する方向であり、第１磁気センサ部は、第１傾斜面に、第２磁気センサ部は、第２傾斜面に設けられており、信号処理部は、第１傾斜面の傾斜角度及び第２傾斜面の傾斜角度に応じて第１センサ信号及び前記第２センサ信号を補正した第１補正信号及び第２補正信号を生成する補正信号生成部を有する。【選択図】図４