PROCESSING DEVICE AND SWITCHING VALVE UNIT

To provide a processing device and a switching valve unit ensuring appropriate suppression of pressure fluctuations in a treatment chamber and reliable switching of multiple types of treatment fluids when discharging multiple types of treatment fluids from a treatment chamber, having an extremely si...

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Bibliographische Detailangaben
Hauptverfasser: KISHITANI KYOTARO, HIGUCHI HIDEAKI, HOSHINO YOSHIFUMI, NISHIDE MOTOI
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To provide a processing device and a switching valve unit ensuring appropriate suppression of pressure fluctuations in a treatment chamber and reliable switching of multiple types of treatment fluids when discharging multiple types of treatment fluids from a treatment chamber, having an extremely simple and compact configuration, and having extremely good maintainability, exhaust sealability, operability, and assembling property.SOLUTION: A processing device with a linear structure includes a chamber that processes an object to be processed with multiple types of processing fluid, an exhaust pipe that is connected to the chamber and exhausted from the chamber, a branch duct corresponding to at least one of multiple types of processing fluid, multiple collective exhaust ducts connected to the processing fluid corresponding to the branch duct, and a switching valve mechanism for exhausting the corresponding processing fluid in the collective exhaust duct. The switching valve mechanism connects a discharge valve body that discharges the processing fluid from the chamber into the collective exhaust duct and an introduction valve body that introduces outside air into the collective exhaust duct.SELECTED DRAWING: Figure 1 【課題】処理室から複数種の処理流体を排出する際に、処理室内の圧力変動の適切な抑制と、複数種の処理流体の確実な切り替えを確保しつつも、極めて簡素かつコンパクトな構成であって、しかも、メンテナンス性、或は排気シール性や作動性、更に組立性も極めて良好な処理装置と切換バルブユニットを提供することにある。【解決手段】複数種の処理流体で被処理体を処理するチャンバとチャンバに接続されチャンバから排気される排気管と複数種の処理流体の少なくとも1つに対応する分岐ダクトとこの分岐ダクトに対応する処理流体に接続する複数の集合排気ダクトとこの集合排気ダクト内に対応する処理流体を排気するための切換バルブ機構とを備え、この切換バルブ機構は、チャンバからの処理流体を集合排気ダクト内へ排出する排出弁体と集合排気ダクト内へ外気を導入する導入弁体とを連結して直動式構造とした処理装置である。【選択図】 図1