ULTRASONIC CLEANING METHOD

To suppress damage of a cleaning object and to clean the cleaning object by simple constitution.SOLUTION: An ultrasonic cleaning method includes: a cleaning liquid application step (S101) for applying cleaning liquid to a surface of an electronic component held on a cleaning stage; a peeling step (S...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MICHAEL KIRKBY, LANDAEZ GARCIA YSMALDO JOSE, MUNAKATA HIROSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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