ACOUSTIC TYPE FOREIGN MATERIAL REMOVING APPARATUS

To suppress damage of an object and to remove a foreign material by simple constitution.SOLUTION: A foreign material removing apparatus includes a stage 10, an acoustic head 20 and a moving mechanism 30. The acoustic head 20 has a plurality of ultrasonic speakers 21 and a casing 22, forms a low-volt...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MICHAEL KIRKBY, LANDAEZ GARCIA YSMALDO JOSE, MUNAKATA HIROSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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