ACOUSTIC TYPE FOREIGN MATERIAL REMOVING APPARATUS

ACOUSTIC TYPE FOREIGN MATERIAL REMOVING APPARATUS

To suppress damage of an object and to remove a foreign material by simple constitution.SOLUTION: A foreign material removing apparatus includes a stage 10, an acoustic head 20 and a moving mechanism 30. The acoustic head 20 has a plurality of ultrasonic speakers 21 and a casing 22, forms a low-volt...

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Bibliographische Detailangaben
Hauptverfasser: MICHAEL KIRKBY, LANDAEZ GARCIA YSMALDO JOSE, MUNAKATA HIROSHI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
BASIC ELECTRIC ELEMENTS
CLEANING
CLEANING IN GENERAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
TRANSPORTING
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Beschreibung
Zusammenfassung:To suppress damage of an object and to remove a foreign material by simple constitution.SOLUTION: A foreign material removing apparatus includes a stage 10, an acoustic head 20 and a moving mechanism 30. The acoustic head 20 has a plurality of ultrasonic speakers 21 and a casing 22, forms a low-voltage region 40 by concentrating a plurality of ultrasonic waves 24 generated from the plurality of ultrasonic speakers 21 into a gap 14 between the casing 22 and a holding surface 10a of the stage 10 and removes a foreign material 90 stuck to a surface 15 of an electronic component 13 from the surface 15 by sucking the foreign material 90 to the low-voltage region 40.SELECTED DRAWING: Figure 1 【課題】対象物の損傷を抑制すると共に簡便な構成で異物を除去する。【解決手段】ステージ１０と、音響ヘッド２０と、移動機構３０と、を備え、音響ヘッド２０は、複数の超音波スピーカー２１と、ケーシング２２と、を有し、複数の超音波スピーカー２１から発生した複数の超音波２４をケーシング２２とステージ１０の保持面１０ａとの間の空隙１４で集中させて低圧領域４０を形成し、電子部品１３の表面１５に付着している異物９０を低圧領域４０に吸引させて異物９０を表面１５から除去する。【選択図】図１